GaN-based light emitting diodes (LEDs) with various p-cap layers were prepared. It was found that surface morphologies of the LEDs with 800oC-grown cap layers were rough due to the low lateral growth rate of GaN. It was also found that 20 mA forward voltage of the LED with 800oC-grown p-AlInGaN/GaN double cap layer was only 3.05V. Furthermore, it was found that we could achieve a high output power and a long lifetime by using the 800oC-grownp-AlInGaN/GaN double cap layer.