鋁合金超高真空腔臭氧水清洗之研究

Study of Ozonated Water for Cleaning of Aluminum Alloy Chambers

詹哲鎧(Che-Kai Chan) ； 劉亦凡(Ivan Liu) ； 熊高鈺(Gao-Yu Hsiung) ； 楊佳螢(Chia-Ying Yang) ； 鄭家沐(Chia-Mu Cheng) ； 陳俊榮(June-Rong Chen)

《真空科技》 21卷3&4期 (2008/12) Pp. 34-38

https://doi.org/10.29808/JVSROC.200812.0005

摘要

本文描述利用歐傑電子能譜術(Auger electron spectroscopy, AES)、光子引發釋氣(photon stimulated desorption, PSD)測量及熱釋氣率(thermal outgassing rate)測量，評估油切削加工＋化學清洗、酒精切削加工＋臭氧水、酒精切削加工三種不同鋁合金真空腔清洗加工方法。實驗結果顯示使用酒精加工配合臭氧水清洗之鋁合金樣品有最佳的清洗效果。

並列摘要

In this paper, we adopted the AES analysis, PSD, and measurement of the thermal outgassing rate to evaluate the surface treatments of oil machining + chemical cleaning, ethanol machining + ozonated water cleaning, and ethanol machining only, which were proposal to apply to the manufacture of aluminium alloy chambers. The test results showed that cleaning with ozonated water has a superior performance.