- 期刊
原子層沉積系統與奈米結構鍍膜製程
Development of Atomic Layer Deposition and Nanostructured Coating Processes
摘要
本文簡述國家實驗室在原子層沉積系統與奈米結構鍍膜技術領域具多樣性及差異化之研發規劃，以妥適整合資源，與學術界互補合作，並期共同建立我國相關自主性真空系統技術平台。
關鍵字
無資料並列摘要
In this article, we would like to outline the developments of diversified atomic layer deposition system and nanostructured coating technologies with great differentiation in ITRC, NARL. Looking forward to being the platform of vacuum technology in Taiwan, ITRC has the obligation to appropriately integrate the process capability and instrument resources, and collaborate with academia and industry.
並列關鍵字
無資料延伸閱讀
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- 謝洪斌（2017）。利用電致選擇性氣相沉積製程技術製備表面奈米圖案化結構〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU201701136
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- Chen, I. T. (2007). A Study on the Applications of Atomic Layer Deposition on Organic Thin Film Transistors [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2007.02161