生根在中研院物理所的掃描探針顯微術

Development of Scanning Probe Microscopy at the Institute of Physics in Academia Sinica

黃英碩(Ing-Shouh Hwang) ； 張嘉升(Chia-Seng Chang) ； 洪紹剛(Shao-Kang Hung) ； 陳彥甫(Yen-Fu Chen) ； 胡恩德(Edwin Hu) ； 楊志文(Chih-Wen Yang) ； 陳雅柔(Ya-Rou Chen)

《科儀新知》 144期 (2005/02) Pp. 18-27

https://doi.org/10.29662/IT.200502.0002

摘要

中央研究院物理研究所經過多年的努力，已成功開發出掃描穿隧顯微術、原子力顯微術及其他相關奈米技術。本文將簡單回顧開發的歷史，並介紹這些儀器的主要架構與功能，此外，也提供圖像與敘述作印證。目前我們正積極開發第二代商品化掃描探針顯微儀，也期望藉著該技術之發展，能結合更多學界與業界之有志之士，將該顯微術之潛能發揮到極致，甚且衍生出嶄新的技術與產業。

並列摘要

After many years of effort at the Institute of Physics in Academia Sinica, we have successfully developed scanning tunneling microscopy, atomic force microscopy, and several other related nanotechnologies. In this article, our development history is briefly reviewed, and the functions and schematics of our instruments are presented. We also show several images taken by our microscopes and provide discussions on them. Now we are actively developing our second-generation commercial scanning probe microscopes. Through the development of these technologies, we hope to cooperate with other scientists and engineers to broaden the current technologies to an unexplored horizon, and to even bring forth new technologies and industries.