由於微電子技術的成功發展,使得真空微電子元件在這幾年再度受到矚目,而碳材料在真空微電子元件上之應用更屬明日之星。鑽石及類鑽石優異的負電子親合力與化學鈍性、奈米碳管的近似一維結構及高的機械強度,皆被視為絕佳的冷陰極材料。在本文中即針對這些碳材料,探討其場發射之機制。
Vacuum microelectronics (VME) for its extensive pragmatic use has been tremendously explored in recent years. Potential applications include flat panel field emission displays, miniaturized microwave power amplifier tubes, advanced sensors, X-ray generators, and electron beam lithography. In these fields, flat panel field emission display plays the essential role of industrial applications. However, the key problem in development of field emission displays (FED) is to fabricate effective cold cathodes. Carbon materials like diamond films are the most prominent material, because of their possible unique electronic property by behaving with negative electron affinity (NEA). Carbon nanotube (CNT) has attracted substantial attention as electron field emission sources due to its unique geometry and electronic properties. In this paper, we attempt to study the field emission characteristics of carbon-based materials.