- 期刊
- OpenAccess
原子力顯微儀的原理（上）
An Introduction to the Principle of Atomic Force Microscope (I)
摘要
原子力顯微儀已被廣泛地應用於表面量測，對於大多數非原子力顯微儀專業的使用者而言，深入了解原子力顯微儀的原理與特徵，有助於正確地操作儀器。本文主要是針對常用的輕敲模式，透過物理的等效運動模式，並配合實驗數據與實際量測之經驗，以說明輕敲模式下探針的運動特徵、探針與表面間的交互作用及輕敲模式的運作原理。
關鍵字
無資料並列摘要
Atomic force microscope (AFM) has been widely used in the field of surface measurement. It is helpful for any of user, especially for most of users who are not familiar with the functions of AFM, to operate AFM properly if they understand more with the principle and characteristics of AFM. In this article, the principle of tapping mode, which is the most frequently used, is mainly introduced. An effective physic model of motion, experimental data and experiences on AFM measurement are used to describe the physic characteristics of cantilever tip motion, tip-sample interaction and the principle of tapping mode.