應用全像干涉技術製作大面積二維與三維週期性結構

Fabrication of Large Area Two-and Three-Dimensional Periodic Structures by Holography Interference Technique

賴玉蝶(Ngoc-Diep Lai) ； 林建宏(Jian-Hung Lin) ； 梁文評(Wen-Ping Liang) ； 許佳振(Chia-Chen Hsu)

《科儀新知》 157期 (2007/04) Pp. 65-72

https://doi.org/10.29662/IT.200704.0008

摘要

我們提出一種簡單和快速的光學干涉全像技術，可製備高品質大面積二維和三維週期性結構，此技術利用雙光束多重曝光干涉方法，藉由控制曝光劑量和每次曝光的轉動角度，可以得到很多新穎的三維週期性結構。比較特別的是，利用此方法所得到的三維週期性結構，其橫向與縱向的晶格常數非常接近，這與一般通用多光束干涉全像技術所得不同。另外，我們提出兩種新的技術，可以在光學干涉全像技術所得到的週期性結構上加入缺陷。

並列摘要

A simple and efficient optical interference method for fabricating high quality large area two- and three-dimensional (2D and 3D) periodic structures was demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures were created depending on the number of exposure and the rotation angle of the sample for each exposure. Three-exposure, in particular, resulted in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. Furthermore, we proposed two methods to embed the defects to the periodic structures that fabricated by multi-exposure of two-beam interference technique.