雷射誘發螢光技術在大氣壓空氣電漿上的應用

Applications of Laser-Induced Fluorescence to Atmospheric-Pressure Air Plasma

張加強(Chia-Chiang Chang)

《科儀新知》 179期 (2010/12) Pp. 18-24

https://doi.org/10.29662/IT.201012.0002

摘要

本文利用雷射誘發螢光技術量測噴射式大氣壓空氣電漿中氮原子、氧原子以及一氧化氮分子之空間分布，呈現出三種完全不同濃度的空間分布。此外，利用NO的LIF量測得到電漿氣體的溫度變化。這些結果顯示出化學物種的組成及氣體溫度與電漿噴嘴的距離十分有關，這顯示出在製程中被處理的材質與電漿噴嘴有最佳的距離，此最佳的距離是由製程中所需的化學物種以及需求溫度所決定。

並列摘要

The spatial distributions of N, O, and NO densities in an atmospheric-pressure air plasma jet are measured using laser-induced fluorescence (LIF). The three densities show completely different spatial profiles. The gas temperature is also measured using the LIF of NO. These results indicate that the composition of chemical species and the gas temperature strongly depend on the distance from the nozzle. It indicates that the optimum distance between the nozzle and a processing material considerably depends on the process; the optimum distance is determined by the required chemical species and the optimum temperature for the process.