以共蒸鍍及濺鍍／硒化法發展高效率CIGS太陽能電池

High Efficiency CIGS Solar Cell Developed by Co-evaporation and Sputtering/Selenization Methods

謝嘉民(Jia-Min Shieh) ； 戴寶通(Bau-Tong Dai) ； 沈昌宏(Chang-Hong Shen) ； 蕭育仁(Yu-Jen Hsiao) ； 薛丁仁(Ting-Jen Hsueh) ； 吳宗達(Tsung-Ta Wu)

《科儀新知》 181期 (2011/04) Pp. 13-27

https://doi.org/10.29662/IT.201104.0002

摘要

銅銦鎵硒(CIGS)薄膜太陽能電池具有低成本、重量輕、可撓曲與壽命長等特點，故受到相當的矚目。國家奈米元件實驗室(NDL)擁有多腔體濺鍍研發系統及高精準度蒸鍍系統，可以在玻璃基板上成長高品質p-型CIGS薄膜。NDL已建立完整之CIGS太陽能電池製程技術，包括以共蒸鍍方式製作之無鎘高效率CIGS太陽能電池，其轉換效率可達14%，CIGS可撓式太陽能電池亦達6%；而具大面積量產潛力之濺鍍／弱化法無毒CIGS太陽能電池轉換效率亦達6.4%。

並列摘要

Copper indium gallium selenide (CIGS) thin film solar cells attracted a lot of attention due to the low-cost, light weight, flexible, long life and other features and advantages. National Nano Laboratory (NDL) possess G1 size (30×40 cm^2) continues sputtering system and high precise co-evaporation deposition system that can deposit high-quality p-type CIGS thin film on glass. NDL has established the manufacturing technology of CIGS solar cells, included high-efficiency Cd-free CIGS solar cell with conversion efficiency of 14% and CIGS flexible solar cell with conversion efficiency of 6% both by co-evaporation method, and non-toxic CIGS solar cell with mass production possibility with conversion efficiency of 6.4% by sputtering/selenization methods.