高速旋轉反射鏡變形狀態量測與量測方法研究

A Study of the Measurement of the Deformation of a High-Speed Rotational Mirror

黃柏瑄(Po-Hsuan Huang) ； 黃鼎名(Ting-Ming Huang)

《科儀新知》 181期 (2011/04) Pp. 75-85

https://doi.org/10.29662/IT.201104.0009

摘要

高速旋轉鏡可使用於光電實驗中，提供一種高速的光學調變機制。此旋轉鏡需要解決動態平衡問題，此外處於高速旋轉狀態時，鏡面結構也經由實驗發現會有發生變形的現象，造成光路反射後端之實驗訊號不穩定，影響實驗數據正確性。本研究發展一種量測高轉速兩面鏡變形現象的方法，兩面鏡轉速由5000 rpm至3000 rpm，觀測結果證明兩面鏡的鏡面在高速旋轉下的確會發生變形，進而導致在光電實驗中兩面鏡後端1550 nm雷射接收端雷射精光功率隨轉速變動的現象，本研究搭配有限元素法分析兩面鏡在高轉速下的變形行為，了解兩面鏡結構與旋轉變形的相關特性。

並列摘要

A high-speed rotational mirror can serve as a modulation mechanism in the optoelectric experiments. Dynamic stability shall be checked before applying this mirror to avoid destroying the rotational spindle. During the high-speed rotation, the mirror may suffer from deformation such that the signal of the experiments will be unstable The authors propose a measurement method to study the deformation of the mirror at a rotational speed ranging from 5000 to 30000 rpm. The experiment and the numerical simulation show that the mirror deforms. Two kinds of measurement types are presented, and the same results can be obtained.