Measurement of the Angular Errors of a Multi- Axis Machine Tool by Using A Novel Optical Rotary-Axis Calibrator

新型光學式多軸工具機旋轉軸角度定位誤差量測系統

陳柏宇(Po-Yu Chen) ； 黃學良(Hsueh-Liang Huang) ； 覺文郁(Wen-Yuh Jywe) ； 王明習(Ming-Shi Wang)

《中國機械工程學刊》 40卷1期 (2019/02) Pp. 55-62

摘要

Based on the theory of laser measurement, this work presents a novel optical rotary-axis angular errors calibrator to measure the angular positioning errors of a multi-axis machine tool. The proposed calibrator integrates a laser-based angular measuring system and a high accuracy rotary stage. The control method of the optical rotary-axis angular errors calibrator is based on autofocusing technology. Additionally, based on the quadrant detector (QD) of the laser-based angular measuring system, the angular positioning signal is detected from the indexing table. Moreover, an angular position for autofocusing the laser spot at QD is provided using the high accuracy rotary stage. The proposed optical rotary-axis angular errors calibrator is verified using commercial instrument autocollimator and laser interferometer. Experimental results indicate that the proposed optical rotary-axis angular errors calibrator detects the angular positioning with an accuracy of approximately ±1 arcsec. Furthermore, the angular accuracy of a multi-axis machine tool can be adjusted within ±1 arcsec, based on the indexing resolution of 0.0001°.

關鍵字

rotary axis ； angular positioning errors ； machine tool ； indexing table

並列摘要

本文提出一種新型光學式旋轉軸量測系統用於多軸工具機的角度定位誤差。本量測系統包含雷射角度測量系統和高精度的旋轉台，光學量測系統採用自動對焦技術的控制方法。本系統的將雷射光點自動對焦於四象限感測器（QD）來量測高精度定位平台的角度定位信號，本系統之驗證採用市售之高精度自動視準儀及雷射干涉儀。根據實驗結果，本文所提出的光學式多軸工具機旋轉軸角度定位誤差量測系統之定位精度為±1角秒。在旋轉平台之解析度0.0001以下，多軸工具機的角度定位精度可在±1角秒內。