新型光學式旋轉軸量測系統

A New Electric-Optical Measurement System for Rotation Spindle Error

邱昌田(Chang-Tien Chiu)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2007年)

摘要

由於現今微精細加工的需求和加工技術已跨入奈米，因此工具機在工作時產生的微小振動都可能成為決定產品是否能達到所要求精密度的重要關鍵。為了能夠提升工具機的加工精度與加工品質，所以必須要有一套適當的量測的工具與方法來改善這些因為旋轉軸所引發的加工精度誤差。
本研究主要利用一多光路設計及相關鏡組(分光鏡、可被光源覆蓋平面反射鏡)，成了多自由度旋轉軸量測法，使用簡便元件組成，如此一來可以減少儀器所造成的誤差，還能降低儀器所需經費，並且能精確的量測出多自由度旋轉軸角度和位移訊號，找出其偏心量，目前量測元件最高解析度可達1μm，工具機轉軸真圓度誤差約60-80μm。

並列摘要

Today, the accuracy of products of micro-manufactures is required higher. When machine tools are worked, the lower accuracy resulted from the error of machine tools. In order to increase the accuracy of machine tools, many measuring systems are developed by the researchers. The System for rotation spindle error measurement is one of these researches.
In this research, designing a particular mount to hold the plane mirror under the rotation-spindle, otherwise, collocating the beam-splitter､Laser source and photo-detector such as PSD (Position Sensing Detector) to measure spindle error motion. Using the simple electric-Optical measurement construction can abstract the influence from wiring problem. Then using semi-reversal technique to reduce set up error. The advantages of the spindle error measurement system are its low cost and its multi-functions, which include spindle speed measurement, spindle stability measurement. The best resolution of the measurement components can be up to 1μm, the rotation spindle error of the machine tool is about 60-80μm.

參考文獻

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