一種光學式高速旋轉軸誤差量測系統

Development of an Electric-Optical Measurement System for Rotation Spindle Error

林益新(Yi-Shin Lin)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

本實驗提出一種創新型高速旋轉軸光電量測技術，利用本實驗所設計旋轉治具結合角隅菱鏡固定在旋轉軸下方，加上分光鏡與雷射光源，以PSD（Position Sensing Detector，以下簡稱PSD）或 QD（quadrant detector），來檢測位移量，由於角隅菱鏡可以消除主軸偏擺角度之影響，因此整個系統可單純量測到旋轉軸的徑向誤差。本實驗利用光學量測方法去量測旋轉誤差，利用此量測方法，不再需要利用誤差分離技術分離傳統旋轉軸中標準棒的製造所造成的誤差影響。由實驗結果可達微米精度，且量測到的旋轉轉速可達10000rpm以上，這是傳統接觸式量測很難達到的轉速。

並列摘要

In this experience, which provided a new innovation electric-optical technic to measure the high speed rotation-spindle. Designing a particular mount to hold the corner-cube under the rotation-spindle, otherwise, collocating the beam-splitter､Laser source and photo-detector such as PSD(Position Sensing Detector)､QD(Quadrant Detector) to measure displacement, Using the corner-cube can abstract the influence from the incline factor, accordingly, whole system just only measure the radial error, Using this method, unnecessary used the splitter technology to split the fabrication error on traditional standard-stick. The result of this system cloud achieve the micro-meter, and cloud measure the error from high speed rotation, this is impossible for traditional contact measurement method.

參考文獻

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