以玻璃模造技術製作雙面微透鏡陣列製程之研究

Fabrication of Micro Tandem Lens Array by Glass Molding Technique

黃建堯(Chien-Yao Huang) ； 周曉宇(Hsiao-Yu Chou) ； 張耿碩(Keng-Souo Chang) ； 蕭文澤(Wen-Tse Hsiao) ； 周長彬(Chang-Pin Chou)

《科儀新知》 184期 (2011/10) Pp. 15-26

https://doi.org/10.29662/IT.201110.0002

摘要

近年來，微透鏡陣列已成為光學系統中的重要元件，微透鏡陣列的其中一個應用即是將光的能量均勻化，相較於單面微透鏡陣列，雙面微透鏡陣列的對位結構更容易。微透鏡陣列若由玻璃材料製作，可應用在高溫環境或高能量系統，例如雷射系統等。玻璃微透鏡陣列可利用雷射加工、光微影技術或精密玻璃模造技術等方法來製造，但是雷射加工技術和光微影技術並不適合量產。因此，本研究利用雷射加工技術和玻璃模造技術來製作雙面微透鏡陣列。首先在碳化矽表面製作直徑500 µm且深度200 µm的微孔陣列，之後利用兩個碳化矽模仁，透過精密玻璃模造技術來成形雙面微透鏡陣列。在本研究中，將探討雷射脈衝重複頻率、雷射掃描速度、模造溫度以及模造力量等參數的影響。此外，亦將探討雙面微透鏡陣列的形貌與折射率等特性。最後利用鈉玻璃材料完成直徑20 mm，且透鏡高度為52 µm、曲率半徑為851 µm、透鏡間距為700 µm之雙面微透鏡陣列。

並列摘要

In recent years, micro lens array (MLA) has become an important element for optical systems. One of the most important applications of MLA is to uniform the intensity of light. The alignment construction of double-sided MLA is easier than one-sided MLA. The MLA fabricated by glass materials could be used in high energy systems or high temperature environment, such as laser system. Glass based MLA could be fabricated by laser machining, photolithography and precision glass molding (PGM) technologies, but the former two technologies are not suitable for manufacturing. In this paper, we proposed a manufacturing method of double-sided MLA by laser machining and PGM technique. A micro holes array was firstly fabricated on the surface of silicon carbide (SiC) mold material with the diameter of 500 µm and depth of 200 µm. The double-sided MLA was then molded by PGM process with two molds. In this paper, the parameters including laser pulse repetition rate, laser scanning speed, molding temperature and molding force, and the characteristics of double-sided MLA such as profile and refractive index were discussed. We obtained the result that the double-sided MLA with the diameter of 20 mm and each lens with the height of 52 µm, the radius of 851 µm, and the pitch of 700 µm on soda lime glass.