新世代原子力顯微鏡成像技術－PeakForce Tapping模式與其衍生量測模式

New Generation Imaging Technique of Atomic Force Microscope-PeakForce Tapping Mode and Relative Deviated Mode

林宏旻(Hung-Min Lin) ； 陳彥甫(Yen-Fu Chen) ； 張家榮(Mark Chang)

《科儀新知》 191期 (2012/12) Pp. 35-45

https://doi.org/10.29662/IT.201212.0005

摘要

PeakForce Tapping透過探針量測行為的改變，改善了傳統AFM量測模式上的不足。本文將介紹其既可保有輕敲式低側向力的優勢，又可以實現如接觸式般直接以即時力量作為線性回饋控制，實現了快速高解析機械性質的分布量測，以及自動回饋優化之AFM量測，並可相容於傳統C-AFM電流量測與KPFM電位量測，使得高品質之形貌、電性與機械性質得以同一時間取得，開創了新的奈米科研與應用領域。

並列摘要

Using PeakForce Tapping could improve the drawback of the traditional AFM technique. In this article, we will explain how PeakForce tapping provides not only rapid quantitative nano-mechanics mapping but also automated feedback optimization of AFM imaging. This new technique is compatible with C-AFM and KPFM, and gains both of mechanics and electrical information in high spatial resolution simultaneously.