新世代桌上型電子顯微鏡的設計與製作

Design and Fabrication of New Generation Laptop Scanning Electron Microscope

張維祐(Wei-Yu Chang) ； 曾英碩(Ying-Shuo Tseng) ； 方建閔(Jian-Min Fang) ； 陳福榮(Fu-Rong Chen)

《科儀新知》 193期 (2013/04) Pp. 4-13

摘要

目前商業用之電子顯微鏡大多佔用過大的空間，以及具有的樣品製備與更換過程。本文首先將由電子光學基本的概念談起，為了達到微小化掃描式電子顯微鏡設計上的要求，在電子光學的基本理論下做了一系列的研究和模擬。最終本電子顯微鏡開發團隊（以下簡稱本團隊）成功發展了台灣第一台由國人自製的桌上型電子顯微鏡，體積為目前市面立地掃描式電子顯微鏡的三分之一，樣品解析能力可以達到20-30奈米的等級。未來，本團隊將進一步發展場發射式桌上型電子顯微鏡，並與像差修正器結合，以達到小於2奈米的解析能力。

並列摘要

The commercial scanning electron microscopes are all large in space such that the sample preparation and exchange takes long time. In this article we introduce the basic concept of electron optics in the beginning. In order to achieve the requirement for minimization of scanning electron microscopes, we have done intensive electron optics simulations, and develop the first homemade desktop scanning electron microscope in Taiwan. The size of desktop scanning electron microscope is one third as small as that of a commercial type. The resolution we have achieved is better than 30 nm. By combining the field emission laptop electron microscopes and the aberration correctors, we prospect to achieve the resolution better than 2nm in the future.