AMOLED顯示器關鍵製程檢測技術

AMOLED Display Critical Manufacture Process Inspection Technology

楊富程(Fu-Cheng Yang)

《科儀新知》 194期 (2013/06) Pp. 31-40

摘要

因應主動式有機發光二極體（active-matrix organic light-emitting diode, AMOLED）顯示器對薄膜電晶體（thin-film-transistor, TFT）的需求，面板廠使用低溫多晶矽（low temperature poly- silicon, LTPS）以提升TFT的通道層之材料電子遷移率（electron mobility），目前以準分子雷射退火（excimer laser annealing, ELA）結晶化的製程為主流，然而此製程的品質目前僅能使用離線或破壞性的方式進行分析，因此目前無法針對此製程做全面性的檢測，針對全面性的檢測的問題目前尚未有好的解決方案，本文針對AMOLED顯示器所要引入製程的主要因素進行探討，並針對此檢測的問題提出了以非接觸式面形取像的結晶化分析的方法以解決目前檢測的問題。

並列摘要

Demand should AMOLED (active-matrix organic light-emitting diode) display of the TFT (thin-film-transistor), display manufacturer using the LTPS (low temperature poly-silicon) enhance the TFT channel layer materials electron mobility, ELA (excimer laser annealing) crystallization process for the mainstream. however the quality of the manufacturing process can only use offline or destructive analysis, so they can not do comprehensive inspection for this manufacturing process, there is no good solution for comprehensive inspection problems, in this paper, we introduce the main reason for the introduction of the manufacturing process, and for this inspection problems, we proposed the non-contact and area scan inspection method to solve the inspection problem.