奈米檢測技術應用

Applications of Nano-inspection Technologies

蘇健穎(James Su) ； 朱念南(Nian- Nan Chu) ； 蕭銘華(Ming-Hua Shiao) ； 蕭健男(Chien-Nan Hsiao) ； 陳峰志(Fong-Zhi Chen)

《科儀新知》 209期 (2016/12) Pp. 4-13

摘要

奈米科技的蓬勃發展，主要歸因於先進製程技術、原子級操控技術以及奈米檢測技術的提升。奈米科技為原子、分子等級的介觀性質研究，更需仰賴精密檢測儀器進行分析。本文透過奈米計量單位、奈米檢測技術簡介、年度盛事等章節，說明當前奈米檢測技術的重要性。

並列摘要

The vigorous development of "Nanotechnology" is attributed to the enhancement of advanced fabrication technology, atomic level manipulation and nanoscale inspection technology. Nanotechnology is the meso-scale property research in the atomic or molecular level, and strongly depends on measurement systems for analysis. In this article, the importance of nanoscale inspection technology at present is introduced through nano metrology standard, nanoscale inspection technology and the annual event.