雷射表面改質技術於感測器平面熱元件製作

Laser Surface Modification Technology Applied for the Sensor Device Planar Thermal Element Fabrication

陳柔甄(Rou-Jhen Chen) ； 林奕成(Yi-Cheng Lin) ； 楊智仲(Chih-Chung Yang) ； 蕭育仁(Yu-Jen Hsiao) ； 蕭文澤(Wen-Tse Hsiao)

《科儀新知》 227期 (2021/06) Pp. 82-95

摘要

隨著雲端、通訊、穿戴式裝置及物聯網產業等新興領域應用快速發展，使得感測器元件廣泛被應用。混合型功能性薄膜材料（mixed functional thin film materials）具備低電阻率（＜ 100 ohm/square）與低功耗特性，適用於製作各種感測器，同時具備輕、薄、短、小、多功能整合特性。本文將以透明導電氧化物、奈米銀線混合透明導電薄膜與導電高分子聚合物（PEDOT：PSS）作為感測器加熱元件應用，並輔以雷射改質技術，作為給讀者未來發展感測元件相關產品參考。

並列摘要

With the rapid development of applications in emerging fields such as cloud, communications, wearable devices, and the Internet of Things industry, sensor components are widely used. The mixed functional thin film materials have the properties of low sheet resistance (＜ 100 ohm/square) and low power consumption; therefore, it's suitable for the production of the sensor devices. This article uses the functional thin film materials- transparent conductive oxide, silver nanowire as network mixed the transparent conductive films and transparent conductive polymer (3,4-ethylene dioxythiophene, PEDOT; Polystyenesulfonic Acid, PSS; PEDOT: PSS) to fabricate thermal components for sensor device applications, as a reference for readers to develop sensor device-related products in the future.