A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures

C. S. Chen ； L. J. Yang ； C. F. Chou

《中國航空太空學會學刊》 35卷1期 (2003/03) Pp. 99-105

https://doi.org/10.6124/TAASRC.200303_35(1).10

並列摘要

This paper studies analytically as well as numerically viscous air damping in laterally oscillating micro comb structures. The analytical results demonstrate that the transient motion is damped out in less than one oscillating period of the comb structures studied. The Knudsen numbers in typical micro comb structures indicate part of the flow falling in the slip flow region. The slip effect is also studied. The predicted quality factors subject to the slip and the nonslip boundary conditions are both larger than the experimental data. The possible explanation for this discrepancy is that our solution procedure assumes that the structure is infinite, while an actual structure is finite and three-dimensional. The pumping and sucking motions at the edges of the comb fingers have significant effects on the flow field.

並列關鍵字

Accelerometer ； Micro comb structure ； Viscous damping