- 期刊
Nano Mechanical Properties Evaluation of R. F. Magnetron Sputtered Chromium Nitride Thin Film
並列摘要
Nano mechanical properties are critical for components in microelectro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). Nanoindentation methods are employed to characterize nano mechanical properties of reactive R. F. magnetron sputtered CrN thin film. The nano hardness and elastic modulus of CrN film are 22.6 GPa and 216 GPa, respectively. The average friction coefficient of CrN film is 0.19. The residual wear depth of CrN film ranges from 4.01 to 5.29 nm after reciprocating wear test under 300, 400 and 500 μN loads. The CrN thin film exhibits very promising wear resistance.
延伸閱讀
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