A Novel Rhombic Piezoelectric Actuator Applied in Precision Positioning Stage

Qian Lu ； Xifu Chen ； Weiqing Huang

《淡江理工學刊》 23卷3期 (2020/09) Pp. 405-411

https://doi.org/10.6180/jase.202009_23(3).0004

摘要

In order to solve the contradiction between high precision and large working stroke in the traditional parallel stage, a novel rhombic piezoelectric actuator was developed. The stator mechanism and the pre-tightening mechanism were proposed, and its working principle was also discussed in detail. The five key structure parameters were optimized based on sensitivity analysis. The experiment results show that the positioning resolution of the rhombic piezoelectric actuator is 0.05 m, and its continuous motion speed is 1.899 mm/s. The synchronization and the repeatability are also proved by experiments. Finally, the proposed rhombic piezoelectric actuator was applied in a new topology of parallel precision positioning stage. The performance data show that the precision positioning stage has excellent resolution and working stroke. All of the fundamental research contents have a very important theoretical value and experiment foundation for further study of the precision positioning stage.

關鍵字

Piezoelectric Actuator ； High Resolution ； Large Working Stroke ； Parallel Precision Stage