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磁控濺鍍製備鈦－氮化不鏽鋼高溫選擇性吸收膜
Prepare of Ti-SSN high-temperature Solar Selective Absorberby Magnetron Sputtering
摘要
本研究以不鏽鋼(SUS321)和鈦(Ti)雙靶材，利用磁控反應性濺鍍方法製備鈦－氮化不鏽鋼(Ti-SSN)太陽能選擇性吸收膜。在真空濺鍍製程中，調整氮氣流量在5和10 sccm及濺鍍功率100 W下，使電漿轟擊出不鏽鋼靶中之金屬原子並通入之氮氣產生反應，生成氮化不鏽鋼(SSN)薄膜。同時控制另一鈦靶材之濺鍍功率100~350 W，形成不同鈦金屬分率之氮化不鏽鋼薄膜，即陶金薄膜(Cermet film)。並以橢圓儀分析其光學常數，進行多層選擇性吸收膜之匹配模擬。實驗製備鈦－氮化不鏽鋼薄膜吸收率達0.88，並接近理論模擬值0.90。由於使用耐高溫之氮化不鏽鋼薄膜與鈦金屬摻雜，並經光學薄膜設計，預期透過氮化不鏽鋼之材料特性，可使元件在高溫的環境下(~300℃)操作使用。
並列摘要
This paper presents a method to prepare Ti-SSN solar selective absorbing coatings by reactive sputtering using stainless steel (SUS321) and titanium (Ti) target. Stainless steel nitride (SSN) thin films were produced under fixed nitrogen gas flow, 5 and 10 sccm, power of Stainless steel target, 100 W. The power of titanium target was adjusted from 100 to 350 W, and produced Ti-SSN ceramic-metal composite (cermet) thin films. The refractive index (n) and extinction coefficient (k) of the cermet composite layers prepared in Ti doping were determined by spectroscopic ellipsometry. The Ti-SSN solar selective absorbing films have solar absorptance of 0.88. A theoretical solar absorptance of 0.90 was achieved by selecting an appropriate combination of three solar absorbing layers. The experimental results agreed well with the theoretical calculations. This study proved the possibility of preparing high temperature (~300℃) solar selective absorbing coatings by using stainless steel and titanium target.