以電化學沉積法製備熱電性碲化銻薄膜之研究

Fabrication of Thermoelectric Antimony–Telluride Films by Electro-deposition Method

吳威逸(Wei-Yi Wu)

指導教授 ： 閔庭輝

國立虎尾科技大學/電機資訊學院/電子工程系碩士班/碩士(2014年)

摘要

在能源危機的隱憂、地球暖化與環保意識高漲、以及先進國家的補助獎勵政策激勵下，太陽光電產業近年來以年平均30%以上快速成長，在全球與台灣都可以明顯感受到此產業的高速發展，未來具有不可小覷的發展潛力。
本研究是探討電沉積碲化銻(Sb-Te)薄膜的熱電特性。在室溫下從硝酸水溶液中用電化學法沉積Sb2Te3薄膜於ITO基板上。在外加電流密度3mA/cm2，得到近化學計量比的Sb2Te3薄膜。退火後在還原性環境中的結果改善了晶體結構，此結果顯示電阻值明顯下降。在473K退火後，功率因數(σS2)從0.04上升至6.32μW/cm•K2。

關鍵字

電化學沉積法 ； 碲化銻 ； 熱電材料

並列摘要

With energy crisis, global warming, environmental consciousness rising, and subsidies from advanced countries, the photovoltaic industry in these years growth by 30% annually. The rapid development trend and potential world not be underestimated in the future.
In this study, thermoelectric properties of the electrodeposited antimony-telluride (Sb-Te) films were characterized. Sb2Te3 thin films were electrochemically deposited on a ITO substrate, from aqueous nitric acid solutions at room temperature. Near-stoichiometric Sb2Te3 thin films were obtained at applied current density of 3 mA/cm2. Post-annealing in a reducing environment resulted in an improvement the crystal structure. This result was indicated by a significant reduction in the electrical resistance. The power factor (σS2) increased from 0.04 to 6.32 μW/cm•K2 after annealing at 473 K.

並列關鍵字

electrochemistry ； antimony-telluride ； thermoelectricity material

參考文獻

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