Micro-hot embossing is a highly effective process for fabricating micro-devices with micro features in polymer. One of the most troublesome problems in precision machinery industry is the time and expense needed to produce a precision micro rapid tooling for micro fabrication. This study presents an approach of manufacturing a hybrid rapid tooling with micro features that is fast, cost-effective and easy to produce. The optimal manufacturing process for fabricating precision micro hybrid rapid tooling was proposed. A cycle time reduction of approximately 88.88% can be obtained when hybrid rapid tooling has a conformal cooling system. Compression strength of precision micro hybrid rapid tooling is about 1.41 times of traditional rapid tooling.