Hot embossing is a cost-effective approach for polymer-based microfabrication. Micro devices must be more quickly and cheaply developed, manufactured and introduced to the market due to the pressure of global competition. This work demonstrates a technique to fabricate hybrid rapid tooling for reducing demolding time during micro-hot embossing molding process. It was found that the demolding time efficiencies for the hybrid rapid tooling produced by the backing materials of copper, aluminum and steel about 78%、68 % and 50% can be enhanced compared to that of the traditional rapid tooling. The replication rate exceeding 96% in the hybrid rapid tooling manufacturing process can be reached. The transcription rate exceeding 93% in the micro-hot embossing molding process can be obtained.