Hot embossing stamp fabricated by aluminum-filled epoxy resin can be employed for low volume productions. However, due to poor thermal conductivity, its process cycle time is much longer than metallic stamps. Therefore, developing hot embossing stamps with high cooling efficiency is an important issue. In this study, three different kinds of hot embossing stamps with or without cooling channels were fabricated using rapid prototyping and rapid tooling techniques. Effects of different hot embossing stamps on the cooling time during hot embossing molding were investigated. It was noted that the cooling time of using a hot embossing stamp with conformal cooling channels can be reduced by about 92% with respect to those without cooling channels.