陣列式多壁奈米碳管/高分子複合材料電阻感測器對化學氣體感測之研究

由於工業有害化學毒氣、對環境、及人類生命健康有其重大影響，因此可靠之化學感測器開發是刻不容緩之事。本研究先以半導體製程技術來製作矽晶圓微電極電阻（interdigitated microelectrode, IME）感測基材，選擇8種不同化學吸附特性之高分子與導電奈米碳管混摻後製成複合材料薄膜，來作為陣列式化學感測元件，經由此陣列式化學感測元件來對6種不同有害化學氣體進行不同溫度下感測。經實驗結果，發現8種高分子對不同溫度之四氫呋喃（THF）、二甲苯、甲苯、氯仿、四氯化碳及甲乙酮等化學氣體，在感測上溫度愈高其感測之靈敏性電阻變化愈大。而對於陣列式感測薄膜與氣體分子相容性方面，利用溶解度參數（Solubility parameter, Δδ）來推論多壁式奈米碳管/高分子與待測化學氣體之間作用力大小；並與實際感測值作驗證比較；顯示溶解度參數差值（Δδ）愈小，相容吸附性愈佳，其感測靈敏度愈大，與實際感測之趨勢相符。另外，在氣體感測辨別上我們參考運用雷達圖及主成分分析統計方法可以明顯鑑識出多壁式奈米碳管/高分子對化學氣體試劑之感測結果。

關鍵字

化學毒氣；多壁式奈米碳管；陣列式電阻感測器；主成分分析法

並列摘要

The development of a reliable gas sensor is more and more important and urgent because the impact of hazardous chemicals from industries on the environment and human health has attracted extensive concern. In this study, the resistance sensor of multi-walled carbon nanotube/polymer composites was prepared with semiconductor process technology and used to detect 6 different harmful chemical gas, tetrahydrofuran (THF), xylene, toluene, chloroform, carbon tetrachloride and methyl ethyl ketone, at different temperature. The results indicate that the higher the temperature, the greater the resistance change and hence the higher sensitivity. In the aspect of the compatibility between our sensing film and the gas molecules, the force between the multi-wall carbon nanotubes/polymer composite film and the chemical gas target can be predicted using the solubility parameters. In addition, the bar chart and statistical method of principal component analysis were utilized to clearly identify the chemical sensing results. Our results show that, compared with the actual detected values, the smaller the difference of solubility parameters (Δδ) is, the better the compatibility of adsorption and the higher of the sensitivity, which is in accordance with the tendency of the real world sensing.

並列關鍵字

Chemical hazardous gases ； multi-walled carbon nanotube ； resistance sensor array ； primary component analysis

國際替代計量

陣列式多壁奈米碳管/高分子複合材料電阻感測器對化學氣體感測之研究

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