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Analysis and Optimization of a high speed and high precision Positioning Machine

並列摘要


With the rapid development of IC industry, the requirements of speed and accuracy of package equipment is increasing. In this study, a redundant parallel mechanism with a parallelogram is studied to realize high speed and high precision positioning. First, the kinematics model of the mechanism is set up and kinematic analysis is performed, such as singularity and dexterity. Second, the elastodynamic model of this mechanism is built and solved using the precise integration method. Based on this, its dynamic response is investigated. Finally, the parameter optimization of the redundant parallel manipulator is performed based on a modified chaos optimization algorithm proposed in this paper. The simulation results indicate that the vibration of this mechanism is restrained dramatically after the parameter optimization is operated.

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