以溶膠凝膠法製備透明導電氧化物薄膜的探討

Sol-Gel-Derived Transparent Conducting Oxide Films

蔡裕榮(Yu-Zong Tsai) ； 周禮君(Lai-Kwan Chau)

《化學》 60卷3期 (2002/09) Pp. 307-318

https://doi.org/10.6623/chem.2002032

摘要

銻錫氧化物薄膜（ATO）及銦錫氧化物薄膜（ITO）皆具有高導電度和高透光度特性，以溶膠-凝膠法製備ATO、ITO 時，是將前驅物 （金屬醇氧化物或金屬鹽類）經由水解(hydrolysis)和聚縮(polycondensation)過程而生成網狀結構之金屬氧化物；這些反應是親核性取代反應，可經由前驅物、溶劑及添加劑的選用而加以調整。金屬醇氧化物的反應性高、易水解，而且它的烷氧基不只會影響水解、聚縮反應，也會影響成膜的性質；而金屬鹽類的水解、聚縮反應主要是受pH 值影響。成膜的導電度來自於高載子濃度及氧空缺，而適度摻雜（doping）可有效提高載子濃度，而於氮氣或氫氣中作熱處理可增加氧空缺。以溶膠-凝膠法製備的ATO 之電阻仍偏高，但以溶膠-凝膠法製備的ITO 之電阻則足以和其他方法相比較。另有作者以溶膠-凝膠法製備濺鍍法用的ITO 靶材，濺鍍法以該靶材製成的ITO 成膜之電阻要比一般靶材製成的低1/3。

關鍵字

溶膠-凝膠 ； ATO(銻錫氧化物) ； ITO(銦錫氧化物)

並列摘要

Antimony tin oxide films (ATO) and indium tin oxide films (ITO) have high electrical conductivity and high optical transparency. By sol-gel process, a metal oxide network of ATO or ITO can be obtained via hydrolysis and polycondensation of the precursor( metal alkoxide or metal salt). Such reactions in nature are nucleophilic substitutions and can be modified by the choice of the precusor, solvent and additives. Metal alkoxides have high reactivity and are easily hydrolysed. The nature of the alkoxyl group influences not only the hydrolysis and polycondensation reactions but also the property of film. Metal salts can also undergo hydrolysis and polycondensation reactions that are strongly dependent on pH. The electrical conductivity of these films arises from the high concentration of carriers and oxygen deficiency. As such, moderate doping can efficiently increase the concentration of the carriers while being heat-treated in nitrogen or hydrogen increases oxygen deficiency. The electrical resistance of ATO produced by sol-gel process is still a little high, but the electrical resistance of ITO produced by sol-gel process is comparable with other methods. Furthermore, ITO films prepared by the sol-gel-derived target has film resistance one third lower than that by the normal target.

並列關鍵字

sol-gel ； ATO(antimony tin oxide) ； ITO(indium tin oxide)