氧化銦錫的特性與製程分析

本文透過共析出法及溶劑熱法成功製備出摻雜鎂及鋁離子之氧化銦錫粉末，摻雜濃度為4at%、6at%與8at%，並探討摻雜對粉體光學及電學性質影響。經溶劑熱處理後，氧空缺增加，粉體的顏色轉為淡藍或深藍色。由全光譜儀分析得知，摻雜鎂會降低其能隙，呈現出紅移的趨勢，但隨著摻雜濃度提升，會呈現藍移的趨勢；而摻雜鋁離子則會增加能隙，呈現出藍移的趨勢。由霍爾電壓得知，隨著摻雜濃度提升，載子濃度也隨之提升，載子遷移率則下降。

關鍵字

氧化銦錫；摻雜；鎂；鋁

並列摘要

The present study has been successful synthesized the Mg and Al -doped ITO powders by the methods of co-precipitation and solvothermal, and the doping concentration are 4at%, 6at%, and 8at%. The effects of doped-elements and content on the optical and electricity properties of ITO powders were investigated. By XRD diffraction analysis, we know that the doped-elements would not change the crystal structure of indium tin oxide. Doping Mg in ITO powders lowered its band-gap energy, and then the spectrum appeared the trends of red-shifted, but with the increment of the doping concentration, the spectrum appeared the trends of blue-shifted by UV-Visible-NIR spectrophotometer. The band-gap energy of Al -doped ITO powders tended to increase and then the spectrums appeared the trends of blue-shifted. With the increment of the doping concentration, the carrier concentration increased and the mobility decreased.

並列關鍵字

indium tin oxide ； doping ； magnesium ； aluminum

參考文獻

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氧化銦錫的特性與製程分析

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