掃描穿透式電子顯微鏡三維斷層顯像法之簡介

Introduction to Electron Tomography by Scanning Transmission Electron Microscopy

張景斌(Ching-Pin Chang) ； 朱明文(Ming-Wen Chu) ； 楊哲人(Jer-Ren Yang) ； 陳正弦(Cheng-Hsuan Chen)

《化學》 66卷2期 (2008/06) Pp. 135-141

https://doi.org/10.6623/chem.2008013

摘要

近年來奈米孔洞材料之研究蓬勃發展，且由於奈米孔洞材料的物理化學性質與其結構有密不可分之關係，故研究人員希望藉由各種分析技術(如：X-射線繞射、電子顯微鏡及氮氣等溫吸脫附分析等)以了解材料之結構，其中以掃描穿透式電子顯微鏡(scanning transmission electron microscopy)對於奈米孔洞材料之微結構而言，提供最直接且有效的觀察方式。本文將介紹目前一種在掃描穿透式電子顯微鏡上對奈米孔洞材料進行三維斷層顯像(3D tomography)之技術。

關鍵字

奈米孔洞材料 ； 掃描穿透式電子顯微鏡 ； 三維斷層顯像

並列摘要

Meso- and nano-porous materials recently have attracted appreciable attention, because their microscopic structural details are strongly correlated with the fascinating physical and chemical functionalities (e.g., catalysis and drug delivery) of these materials. An elaborate microstructural characterization of the materials in three dimension is thus crucial, and the superb spatial resolution (a few nanometers) with an atomic number sensitivity of electron tomography by scanning transmission electron microscopy provides an unmatched solution for this purpose. Here, we briefly introduce the principles of electron tomography by scanning transmission electron microscopy and some experimental demonstrations are given.

並列關鍵字

Nano-porous materials ； Scanning transmission electron microscopy ； Electron tomography.