Study on the Effect of Nano-SiO_2 in ULSI Silicon Substrate Chemical Mechanical Polishing Process

高健銘（2014）。Effect of Nano Structure to Stress Concentration Caused by Thinning Silicon Chip Surface Defect〔碩士論文，國立清華大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0016-2912201413501510
蔡明雄、林憶如、李淑杏、王蕾蕾（2004）。The Study of Surface Modification of Nano Colloidal Silica。材料科學與工程，36(2)，130-133。https://doi.org/10.6409/JMSE.200406.0130
黃昭睿（2004）。Study of Silicon Luminescence Efficiency using Silicon Nano-Structures〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2004.00397
Chang, Y. Y. (2009). The study of surface nanostructure nucleation process in [master's thesis, National Chiao Tung University]. Airiti Library. https://doi.org/10.6842/NCTU.2009.00942
林建宇（2010）。Study on Surface Treatment of Filter by Nano Structure of ZnO〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2010.03125