Recent Advances in Unconventional Lithography for Challenging 3D Hierarchical Structures and Their Applications

張貴安（2012）。Virtual Metrology to the Control of Critical Dimension in Lithography Process〔碩士論文，中原大學〕。華藝線上圖書館。https://doi.org/10.6840/cycu201200157
Chang, H. C. (2010). Micro-lithography Hierarchical Source and Mask Optimization using Abbe-PCA [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2010.01501
Chen, Y. F., Kang, S. H., Fang, T. H., & Hong, Z. H. (2011). Preparation and Characterization of Nanostructures Using Scanning Probe Discharge Lithography. Journal of Science and Innovation, 1(1), 33-37. https://doi.org/10.6654/JSI.201101_1(1).0004
王韻雯（2015）。Study of Achromatic Interference Lithography Technology Used in Large-Area Lithography〔碩士論文，國立清華大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0016-0312201510262172
Su, Y. H. (2006). An AFM Study For Lithography and Dynamic Behaviors on Lipid Membranes [master's thesis, National Central University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0031-0207200917342995