The major end-use applications of machine tool are rough processing for high performance and finishing processing for high accurate and high quality. Machine tool is a mechatronic system in nature which including structures and servo-drive controller. A correct structure model and servo-drive control model are needed for building accuracy multibody dynamic mechatronic digital model that can be used in analyzing machine dynamic behavior by CAE technique. Any sub-system model's correctness will affect the accuracy of total system's model. The correctness of interface's model between each sub-system will also affect the accuracy of total system's model. This paper will discuss the problem of finishing processing. First identify the servo motor control loop model and establish the dynamic response of machine structure. Finally, combining servo-drive control model and structure model to carry out the simulation for path error.