量測機台幾何誤差之六軸雷射干涉儀

Six-Degree-of-Freedom Interferometer for Detecting Geometric Errors of Precision Stages

林世聰 ； 馬兆廷 ； 陳世剛 ； 陳昭元 ； 黃泓諭 ； 廖述政

《機械工業雜誌》 428期 (2018/11) Pp. 60-65

摘要

隨著工業4.0的快速發展，智能工廠已成為現在工業趨勢，其中干涉儀將擔任超精密離線或線上量測的最重要角色。本研究提出一套干涉儀，它是由一雙頻雷射和六個干涉模組所組成，且它能夠同步地檢測精密平台的六個位移（兩個沿x軸，三個沿y軸，一個沿z軸），並依此計算該平台的六自由度幾何誤差。本文詳細地介紹了該干涉儀、實驗架設、與實驗結果。結果證實了所提出干涉儀的正確與可應用性。

關鍵字

差頻干涉儀 ； 精密位移平台 ； 六自由度 ； 幾何誤差

並列摘要

With the rapid development of Industry 4.0, smart factories have become the current industrial trend where interferometers would be in charge of offline or online super-precision inspections. An interferometer, composed of a dual-frequency laser and six interference modules, capable of inspecting precision stages was proposed in this research. The interference modules retrieve six displacements, two along x-axis, three along y-axis, and one along z-axis of the examined stage, which are then used to figure out the stage's six-degree-of-freedom geometric errors. This paper introduces the interferometer in detail, it then presents the experimental results from the use of the interferometer. The results confirm the validity and applicability of the proposed interferometer.

並列關鍵字

Heterodyne interferometer ； Precision stage ； Six-degree-of-freedom ； Geometric error