三維度壓電掃描探針顯微鏡之設計開發與探討

Design and Development of Three-degree-of-freedom Piezo Scanner for Scanning Probe Microscope

季敬棠(Ching-Tang Chi)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.00636

摘要

奈米科技的不斷發展需要高精密的三維量測方法來解析各種樣本的奈米結構。三維度壓電掃描探針顯微鏡主要整合了三維度致動器和特殊探針型式。本論文的目的在於運用積層壓電塊設計開發一個能長行程與精密定位掃描的三維度致動器。慣性致動原理被採用於實現長行程致動，而連續致動則被用於精密定位和掃描程序。三維度致動器由三個致動模組單元構成，每個致動模組單元都有相同的架構，包含一個積層壓電塊、 一個致動桿和V型導引。為了使致動桿和V型導引之間達到穩定的摩擦力，使用了彈簧和撓性結構，並透過調整螺絲進行調
節。
最佳化設計過程中，透過理論分析探討致動模組單元的影響參數與致動性能之間關係。主要的影響參數為導引靜摩擦力、驅動電壓、驅動頻率與負載，皆由性能測試驗證其對致動位移的影響。主要的影響參數為導引靜摩擦力、驅動電壓、驅動頻率與負載。致動模組單元和整體3D致動器也都經過不同測試實驗驗證
過。
X、Y與Z軸皆有最大行程10 mm，致動解析分別可達 400 nm、50 nm和3.6 nm。而慣性致動原理能達成最大平均步進量則為900 nm、380 nm與360 nm。三維度致動器的共振頻率分別為916 Hz、823 Hz和910 Hz，而其Q值則為28.63、51.43和94.87。X和Y軸致動單元有較高阻尼效應可以抑制高速掃描運轉下的掃描超越振動和殘振。三維致動單元之間的交錯干擾則在1.27％與0.19％之間變
動。

關鍵字

三維度掃描 ； 線性致動器 ； 積層壓電塊 ； 致動模組單元 ； 慣性致動原理 ； 連續致動

並列摘要

The progressive nano-scientific development requires highly accurate Three-degree-of-freedom metrology (3D-metrology) methods for resolving diverse nano-scale sample structures. A 3D-scanning microscope is mainly integrated with a 3D-scanner and special types of probe. The aim of this thesis is to design and develop a 3D-scanner for fulfilling long-stroke, precision positioning and scanning functions by using the piezo stacks. The inertial actuation principle is chosen for realizing the long-stroke actuation, and the continuous actuation is applied for the precision positioning and scanning processes. The 3D-scanner is built up by three modular actuation units. Each modular actuation unit has the same configuration, which consists of a piezo stack, an actuation rod and V-shaped guide. For achieving constant and stable frictional force between the actuation rod and the V-shaped guide, the spring and the flexure structure are applied and regulated by the adjusting screws. For design optimization , the modular actuation scanner is theoretically analyzed to study the relationship between influential parameters and actuation performance. The main influential parameters are the static guiding friction , driving voltage, driving frequency, and load. Moreover, the actuation performances of the modular actuation unit and the complete 3D-scanner are also verified by different testings.
The maximum strokes on the X, Y, and Z-axis are 10 mm, 10 mm, and 10 mm, respectively, and their corresponding actuation resolutions are 400 nm, 50 nm, and 3.6 nm. The maximum average steps achieved by the inertial actuation principle are 900 nm, 380 nm, and 360 μm. The 3D-scanner possesses the resonant frequencies of about 916 Hz, 823 Hz, and 910 Hz, and Q factor are 28.63, 51.43, and 94.87, respectively. The X and Y-axis actuation units have large damping effect that can depress overshoot and residual vibration during the high-speed scanning operation. The cross-talk interferences between the 3-axis actuations vary between 1.27% and 0.19%.

並列關鍵字

Three-degree-of-freedom scanning ； Linear actuator ； Piezo stack ； Modular actuation unit ； Inertial actuation principle ； Continuous actuation

參考文獻

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