雙軸奈米級定位系統之設計開發與性能測試

Design and Development of Biaxial Nano-scale Positioning System

陳劭侖(Shao-Lun Chen)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.00350

摘要

本論文設計開發應用於掃描探針顯微術中樣品運載的較長行程雙軸精密定位系統。雙軸奈米級定位系統由線性致動器、位移量測器及定位控制器等三大子系統所組成，線性致動器以剪力式壓電元件作為驅動源，透過慣性驅動原理以達到長行程且準確的位移致動，並採用扁圓形簧片導引裝置，提供線性的滾動導引及穩定的接觸摩擦力；位移量測器採用體積緊緻的全像式讀取頭，搭配適當鏡片組來提升其量測解析度，並以聚焦誤差訊號之線性區段作為量測範圍；定位控制器擷取和處理位移訊號，並控制驅動電壓使線性致動器精密地定位致動。定位系統的性能影響因素包括鋸齒波形之電壓及頻率、扁圓形簧片導引裝置所提供之預力以及負載質量等，皆透過性能測試實驗進行驗證。對於慣性驅動原理進行理論推導，並由性能測試驗證其運動特性。雙軸定位系統之單軸線性位移總行程為 4mm，質量負載可達 200g，壓電致動器最小平均步進量為 4.1nm，驅動訊號於共振頻2kHz時有最大平均步進量。雙軸定位平台利用高頻和高驅動電壓進行快速定位，而由小驅動電壓進行精密定位。全像式位移量測器於S曲線線性區段的位移量測解析度可達6.3nm。

關鍵字

定位系統 ； 線性致動器 ； 剪力式壓電元件 ； 慣性驅動原理 ； 扁圓形簧片導引 ； 全像式讀取頭 ； 聚焦誤差訊號

並列摘要

A biaxial long-stroke positioning system applied to the sample delivery in scanning probe microscopy (SPM) is designed and developed in this thesis. The biaxial nano-scale positioning system is built up by three subsystems, which include two linear actuators, two displacement sensors, and one positioning controller.
In order to achieve long-stroke and nano-scale positioning function, each linear actuator is driven by four shear motion mode (SMM) piezoelements on the inertial driving principle. And the flat-circular spring is applied to realize a frictionless rolling guide for the linear actuator and a stable actuating friction between the stage and the four piezolements.
For realizing a compact system, the tiny HOE pick-up head is chosen as the displacement sensor. And through equipping adequate objective lens and collimator lens its measurement resolution is enhanced. The derived output signal from the HOE pick up head, the focus error signal (FES), is well in linear proportion to the actuation displacement. The displacement signals and the driving voltages for actuators are all processed in the positioning controller. The inertial driving principle of the linear actuator is detailedly analyzed to study the relationship between main influential parameters and the positioning performance. Moreover, the positioning performance is also experimentally verified.
The maximum stroke for each linear actuator is 4 mm, and its stepping resolution is about 4.1 nm. The actuator can drive a maximum payload of 200g. And by the resonant driving frequency of 2 kHz, the actuator can achieve a maximum average step of 50 nm. The biaxial positioning system not only can produce fast and coarse positioning actuation through high driving voltage and frequency, but also can realize precision nano-scale positioning through low driving voltage and frequency. The positioning accuracy is mainly dependent on the displacement sensing performance of the HOE-pick up head, whose measurement resolution is 6.3 nm.

並列關鍵字

Positioning system ； Linear actuator ； Shear motion mode (SMM) piezoelement ； Inertial driving principle ； Flat-circular spring guide ； Holographic optic element (HOE) ； Focus error signal (FES)

參考文獻

[13] 劉信廷，「三軸閉迴路奈米定位致動系統之設計開發與特性研究」，國立台灣大學工學院機械工程學系碩士論文， 2008。

[14] 梁國贊，「全像式原子力顯微鏡之設計與開發」，國立台灣大學工學院機械工程學系碩士論文，2009。

[2] Inoue, T., Nada, T., Miyama, T., Sugiuchi, K., and Takahashi, S., “Low-frequency Flextensional Piezoelectrictransmitter with Displacement Amplifier”, Ultrasonics Symposium, 1987, pp.765-770.

[3] Peter E. Tenzer and Ridha Ben Mrad, “A Systematic Procedure for the Design of Piezoelectric Inchworm Precision Positioners,” IEEE/ASME Transactions On Mechatronics, Vol. 9, No. 2, June 2004.

[4] Y. Yamagata, T. Higuchi, H. Saeki, H. Ishimaru, and Hartmann, U., “Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements,” J. Vac. Sci. Technol. A, Vol. 8, No.6, Nov/Dec 1990.