- 學位論文
壓電蜂鳴片定位致動器與電感位移感測器之設計開發與探討
Design and Development of A Positioning System Using Piezo-Buzzer Actuator and Inductance Sensor
摘要
本論文設計開發一單軸定位致動系統，期望可應用在並聯多軸定位平台上，同時滿足精密工程的定位需求。單軸定位致動模組由壓電蜂鳴片致動器、電感感測器以及驅動導引系統所組成。致動器方面，採用國產壓電蜂鳴片作為驅動源，並以慣性滯滑原理作為致動器的驅動，驅動電壓、頻率以及負載為致動器之主要影響參數。電感感測器方面，根據致動器的結構限制選用螺線管式線圈，先從電感理論探討分析感測器的影響參數，分別開發出諧振式以及差動式電感感測器。以開發完成之致動器和感測器之特性為基礎，運用LabVIEW程式平台撰寫完成單軸定位控制程式，透過人機介面可以調控各種參數進行定位控制測試。 單軸致動模組之線性位移行程為5 mm，垂直位移負載最大可達15 g，最小平均步進量為88.4 nm。驗証證實差動電感感測器具有高重現性和低遲滯性的特性，在量測範圍為5 mm時非線性度為3.65 %，最高解析度可達2.7 um。回饋系統控制可以控制定位誤差低於12 um。
並列摘要
The aim of this thesis to develop a single axis positioning module that is applicable to build up diverse multi-axis stages for precision applications. The single axis positioning module comprises piezo buzzer actuator, inductive displacement sensor and linear guide. In order to achieve long-stroke and high resolution actuation, the actuator is driven by the piezo buzzer through the inertial driving principle. Its main influential parameters are driving voltage, frequency and load. According to the actuator construction, the solenoid is chosen to realize the inductive displacement sensor. Its design parameters are firstly derived by analyzing its inductive theory. And for realizing a precision displacement sensing, two different sensing circuits, the resonant and the differential, are developed to find out the optimal ones. Finally based on the derived characteristics of the developed actuator and the sensor, the single axis positioning control algorithm is programmed on the LabVIEW software platform, and through the parameter regulation on the man-machine interface the positioning control efficiency can be experimentally verified. The single axis positioning module has the maximum stroke of 5 mm and can bear the maximum vertical load of 15 g, and its minimum average stepping resolution is 88.4 nm. In comparison with the resonant sensing circuit, the differential sensing circuit can achieve higher repeatability and smaller hysteresis. The inductive displacement sensor can realize a measurement resolution of 2.7 um and a nonlinearity of 3.65 % for full displacement range of 5 mm. Through the close loop control, the single axis positioning module can make the positioning error smaller than 12 um.
參考文獻
延伸閱讀
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