超高真空掃描穿隧顯微鏡用壓電致動器之設計開發與特性分析

Development and Research of A Piezoelectric Actuator for the Scanning Tunneling Microscope used in Ultrahigh Vacuum

李其叡(Chi-Jui Lee)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.01076

摘要

本論文的研究目的在於設計開發適用於超高真空環境下之掃描穿隧式顯微鏡的壓電致動系統。壓電致動系統採用尺蠖式致動原理，其中包含壓電陶瓷元件、夾持系統與進給機構等部分。積層式壓電元件被用來驅動撓性機構，達到夾頭開合的弁遄C夾頭中撓性機構是以放電線切割一體加工製造出來，透過夾持預力提供進給機構精確導引和穩定性。首先依據壓電元件所測得的特性，以模擬與實驗方式探討夾頭的夾持特性。最後再針對尺蠖式致動系統之性能進行測試，其中包括有位移、速度、作用力與解析度等，研究各設計與運轉參數對整體性能的影響。

關鍵字

壓電致動器 ； 超高真空 ； 掃描穿隧式顯微鏡 ； 撓性機構 ； 夾持系統設計 ； 尺蠖式

並列摘要

The aim of the thesis is to develop a piezoelectric actuator for the Scanning Tunneling Microscope used in Ultrahigh Vacuum (UHV STM). The actuator is operated with the inchworm actuating principle. This actuator system includes piezoelectric elements, clamping device and driving mechanism. A piezoelectric stack element is actuated to drive the flexure mechanism, so that the clamping device can release or clamp the scanning tube. The flexure mechanism is manufactured by the wire electrical discharge machine. With the pre-stress, the flexure mechanism can provide precise guiding and stable actuation. Firstly according to measured properties of piezoelectric elements, the characteristics of the clamping device are analytically and empirically studied. At last through the performance tests such as displacement, speed, force and resolution, the influences of design and operation parameters on the system performance are investigated.

並列關鍵字

ultrahigh vacuum ； STM ； clamping system design ； inchworm ； flexures ； piezoelectric actuator

參考文獻

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