電子廠廠務真空泵變頻節能實務

Energy Saving Example of Process Vacuum Pump in Electronic Factory

沈宗福 ； 盧江溪 ； 吳江龍 ； 詹瑞麟 ； 楊竣翔

《機械工業雜誌》 439期 (2019/10) Pp. 65-69

摘要

電子廠中半導體與光電廠廠務設施中使用100mbar粗略真空作為製程使用，傳統定速真空泵於壓力達到時，仍然以全速運轉，消耗相當大之電力，新型變頻真空泵於壓力達到時，會降低轉速，相對的消耗電力比傳統定速真空泵少很多，節能一般可達20～50%。本文主要針對近年來輔導國內電子廠進行馬達動力系統（真空泵系統）節能改善成為示範廠商的案例，說明改善的評估過程、改善手段與結果，以作為國內廠商導入真空泵系統節能之參考。

關鍵字

高效率馬達 ； 節能 ； 真空 ； 泵

並列摘要

In electronics factory, semiconductor fab and optoelectronic plant, vacuum degree of 100 mbar is commonly used in process facilities. When a traditional fixed-speed vacuum pump has reached the required vacuum level, e.g. 100 mbar, it is still running at full speed operation, and part of the power is wasted and should be taken into consideration. However new frequency modulation vacuum pumps can reduce the speed and still keep the required vacuum degree. The power consumption of new frequency modulation vacuum pump is much less than the traditional fixed speed vacuum pump, and the energy saving is up to 20 ~ 50%. This paper introduces the cases of energy-saving improvement of vacuum pump systems in domestic electronics factory in recent years. The improvement evaluation process, improvement means and results are described, which can be used as reference for domestic manufacturers who are interested in energy saving of using vacuum pump system.

並列關鍵字

High efficiency motor ； Energy saving ； Vacuum ； Pump