超快雷射玻璃微銲接技術

Ultrafast Laser Micro Welding Technology for Glass

陳園迪 ； 蔡武融

《機械工業雜誌》 443期 (2020/02) Pp. 14-20

摘要

本文介紹超快雷射玻璃微銲接技術之國際開發進展與專利分析，並說明工研院雷射中心在本技術的發展狀況。本方法所銲接之工件具有優異的機械強度、耐熱性、抗腐蝕性及高氣密性等優點。可應用於互補式金屬氧化物半導體（CMOS）晶片銲接、生醫晶片銲接等。工研院並開發可變長度微光柱模組，將焦點整形為均勻的微光圓柱狀，且光柱長度可變，用以提升各類銲接件之銲點均勻度與強度。

關鍵字

超快雷射 ； 玻璃 ； 銲接

並列摘要

This article introduces global development and patent analysis in the ultra-fast laser micro-welding technologies for glass and describes current ITRI development status on this technology. The workpiece welded by this method offers advantages of excellent mechanical strength, heat resistance, corrosion resistance and high air tightness. This method can be applied to complementary metal oxide semiconductor (CMOS) wafer welding, biomedical wafer welding, etc. ITRI has also developed a variable-length, micro-light column module that shapes the focus into a uniform micro-cylindrical shape with variable length to improve the welding bead uniformity and welding strength for various types of welding parts.

並列關鍵字

Ultrafast laser ； Glass ； Welding

參考文獻

Ciuca, O.P.,Carter, R.M.,Prangnell, P.B.,Hand, D.P.(2016).Characterisation of weld zone reactions in dissimilar glass-to-aluminium pulsed picosecond laser welds.Mater. Charact..120,53-62.

Carter, R.M.,Troughton, M.,Chen, J.,Elder, I.,Thomson, R.R.,Daniel Esser, M.J.,Lamb, R.A.,Hand, D.P.(2017).Towards industrial ultrafast laser microwelding: SiO2 and BK7 to aluminum alloy.Appl. Optics.56(16),4873-4881.

Matsuyoshi, S.,Mizuguchi, Y.,Muratsugu, A.,Yamada, H.,Tamaki, T.,Watanabe, W.(2018).Welding of Glass and Copper with a Rough Surface using Femtosecond Fiber Laser Pulses.J. Laser Micro/Nanoen..13,21-25.

Zhang, G.,Cheng, G.(2015).Direct welding of glass and metal by 1 kHz femtosecond laser pulses.Appl. Optics.54,8957-8961.

Li, P.,Xu, X.,Tan, W.,Liu, H.,Wang, X.(2018).Improvement of Laser Transmission Welding of Glass with Titanium Alloy by Laser Surface Treatment.Materials.11,2060.