The industry of machinery equipment is one of the characteristic industries in Taiwan. In addition to the matured cluster of machine systems and automated components integration, in recent years, Taiwan also invested in the new waves of industry 4.0 and smart machines across the industries. However in the area of smart machines with performance prediction diagnosis system, the commercialized key element sensors are not yet available due to the cost and lack of required expertise in various fields. This article will introduce how to build the smart sensing ecosystem through the development of MEMS sensors.