Due to the impact of US-China trade war, COVID-19 pneumonia and extreme weather, global manufacturing industry is facing megatrends such as improving industrial resilience, promoting digital transformation, and achieving net zero emissions. To face up to these megatrends, machinery industry needs to use smart machinery and smart manufacturing solutions to help the downstream continue to create values and meet various needs derived from the megatrends. The applications of smart machinery can help manufacturers continue to improve efficiency, increase availability, and realize service business models of equipment. Taiwan machinery industry can also break the price limitation of machine tools through developing smart machinery and smart manufacturing solutions. Thus, the domestic manufactures increase not only their profitability and added-value products, but also the market share in semiconductor production equipment, allowing to further consolidate the competitiveness of the semiconductor industry in Taiwan.