Analysis on the Development of Semiconductor Manufacturing Processes

Zihan He

《International Core Journal of Engineering》 8卷11期 (2022/11) Pp. 262-266

https://doi.org/10.6919/ICJE.202211_8(11).0032

摘要

The computing speed of chips depends on the number of transistors. In other words, if you have more transistors, the computing speed of chips will be faster. Supposing the area of a chip is limited, we need to develop ways to fit in more transistors. To put more transistors in chips, minimizing the existing microelectronic device is a good way. To achieve that goal, we need to develop effective semiconductor manufacturing process to develop the performance of chips. In this paper, the research topic is to introduce the development of processes and also show their relevant applications of process. This paper intends to let more people realize the importance of semiconductor manufacturing processes and how it applies to our daily lives. This paper will investigate the following question: until October 2021, which is the most advanced manufacturing process? What are some other areas that we can expand through manufacturing process? The conclusion is that until October 2021, the most advanced process is N5P. Semiconductor manufacturing processes apply to areas like Adaptive Substatistical PCA, complicated material modeling tools and methods.

關鍵字

Semiconductor Manufacturing Process ； Transistor ； Performance ； TSMC ； EUV Extreme Ultraviolet Photolithography

參考文獻

2019 IEEE international electron devices meeting (IEDM). (2019). https://doi.org/10.1109/iedm19573. 2019.

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