氣動射流震盪器驅動微幫浦之研發

中文摘要本文主旨在利用軟微影製程技術製造以聚二甲基矽氧烷（PDMS）為材質之氣動式微幫浦，PDMS材質具有高度生物相容性。此元件為多層結構，主要包含容納氣體的腔室及薄膜、微流道等結構。藉由壓克力製之射流震盪器驅動薄膜致使擠壓薄膜下之液體達到帶動液體的目的。本元件不需外加控制系統，僅需一穩定壓縮空氣源，利用射流震盪器之特性即可轉換成具有週期之非穩態氣流。元件各層結構利用微影技術，先將SU8-100製作母模於玻璃片上，再將PDMS淋至母模後烤乾，最後從母模撕下PDMS，經電漿處理可將多層元件組裝完成。本文使用CFX4.4套裝軟體模擬射流震盪器內壓力變化和供應壓縮空氣壓力與頻率之關係，結果顯示震盪器中隻噴流擺動頻率與入口壓力有良好線性關係。並且左右氣體流到之相角差約一百八十度。在微幫浦之實驗中，調整震盪器入口壓力在0.3-1.3大氣壓力，觀察到於微流道兩端儲水槽之玻璃館內液面差，得到微幫浦之流率約為4 ml/sec 至 9 ml/sec。

關鍵字

射流震盪器；微幫浦

並列摘要

Abstract We describe here a periodically driven polymer (PDMS) membranes designed to operate as a micro pump. Our device consists of multiple layers including two main components: air chambers with membranes and microchannel respectively. We put a fluidic oscillator which made of acrylic to use actuate membranes that pump fluid in the microchannel underneath. The backbone of the design is the micro-oscillator which requires only a steady air source to transfer into unsteady flow. In order to drive the fluid under membranes, a basic oscillator design was varied in terms of asymmetric feedback channel geometry. Since a minimum of three membranes is need for peristaltic pump actuation, a center channel is added to the oscillator design, allowing the jet flow to alternate in three directions. The frequency of oscillation is proportion to the pressure of supplied air. All of components of the device is constructed by using soft lithography. Multilayer structures are combined by bonding layers of PDMS, and each of layers is cast from a micromachined mold separately. The cast is made of photo-resist SU8-100 which is spin-coated onto a glass slide then exposed to UV light to construct air chambers and a microchannel pattern as a replica molding. Pouring PDMS onto the cast, and then placed it on a hot plate to cure. Peeled off PDMS from the cast, then using a plasma oxidation cleaner to bond multi-layer to each other. For simulations, using CFX 4.4 commercial package, the dimensions were derived from the experimental model. Our result indicate that phase shift was about 180 degree. The experiment is performed by applying constant pressure with a range of 0.3 kg/cm2 to 1.3 kg/cm2 into the fluidic oscillator. By observing tubes between inlet and outlet of microchannel, we got the pumping flow rate with a range of 4 ml/sec to 9 ml/sec.

並列關鍵字

micropump ； fluidic oscillator

參考文獻

Nam-Trung Nguyen and Steven T. Wereley, Fundamentals and Applications of Microfluidics. Artech House, 2002.

Francis E. H. Tay, Microfluidics and BioMEMS Applications. Kluwer Academic Publishers, 2002

J. G. Smits. “Piezoelectric micropump with three valves working peristaltically”, Sensors and Actuators A, Vol. 21, 203 (1990)

J. A. Folta, N.F. Raley, E. W. Hee. “Design, fabrication and testing of a miniature peristaltic membrane pump”, 5th Technical Digest Solid-State Sensor and Actuator Workshop, 186 (1992)

H. T. G. Van Lintel, F. C. M. Van De Pol and S. Bouwstea. “A piezoelectric micropump based on micro-machining of silicon”, Sensor and Actuators A, Vol. 15, 153 (1989)

國際替代計量

氣動射流震盪器驅動微幫浦之研發

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