光波前表面變形量測系統之設計與開發

Design and Development of Shack-Hartmann Surface Deformation Measuring System

許俊榮(Chun-Jung Hsu)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2016年)

https://doi.org/10.6342/NTU201600726

摘要

隨著精密技術的發展，高解析度的量測方法已成為近年來發展的重點之一。其中光學量測技術具有非接觸與高解析度的優點，因此近年來已被廣泛應用於精密量測上。Shack-Hartmann光波前感測器是藉由量測光波前的變化，精準地感測光束在傳遞過程中產生的光程差，可利用透射式光路量測透鏡與大氣的像差變化，亦可配合反射式光路量測物體表面變形。
本論文設計開發出可微調式Shack-Hartmann光波前感測器，並建構一套高解析度的Shack-Hartmann光波前表面變形量測系統，用以量測壓電元件在致動時的表面變形。藉助光學模擬軟體對系統光路進行分析，以最佳化系統光路，並藉由實驗結果驗證系統光路之量測特性。本文採用反射式光路進行表面變形量測，藉由量測反射光束之光波前變化，可反推被測物之表面變形輪廓，使用準直平行光作為量測之參考光束，分別對壓電蜂鳴片與積層式壓電塊輸入電壓使其產生變形，並利用設計系統進行量測，操作電壓範圍為-50 V至50 V。經由實際量測，得以利用光波前重建壓電元件之變形輪廓。本論文設計開發之感測器的量測精密度為0.203 λ，精準度達0.032 λ，解析度則可達0.033 λ。

關鍵字

Shack-Hartmann光波前感測器 ； 反射式量測 ； 表面變形量測 ； 壓電元件變形

並列摘要

With the development of precision technologies, measuring methods with high resolution have become more and more important for the past few years. Due to the advantages of non-contact and high resolution of optical measurement, it has been applied to precision engineering for several years. Shack-Hartmann wavefront sensor (SHWS) can precisely detect the optical path difference of the light beam. By using the transmissive optical setup, it can measure the wavefront aberration caused by lens and atmosphere. Also, it can measure the surface topography by applying the reflective optical setup.
A tunable SHWS with high resolution is designed in this paper. Shack- Hartmann deformation measuring system is also constructed to measure the surface topography of the piezoelectric components. The optical setup of the system is analyzed by the optical simulation software. The components of the system are optimized by the simulation results, which are also used to compare with the experimental results. Reflective optical setup is applied in this paper to measure the surface deformation, and a collimated beam is used as a reference beam. Providing voltage, from -50 V to 50 V, is applied to piezoelectric components to make them deform. The designed system is applied to measure the deformation of the surface. The profile of the deformed surface can be obtained by measuring the change of wavefront of the reflective beam. Finally, the accuracy of tunable sensor is obtained to 0.203 λ by experiments. The precision reaches 0.032 λ, and the resolution reaches 0.033 λ.

並列關鍵字

Shack-Hartmann wavefront sensor ； reflective measurement ； surface deformation measurement ； deformation of piezoelectric components

參考文獻

[14] 張哲維，2015，光波前多軸位移量測系統之設計與開發(Shack-Hartmann Wavefront Sensor for Multiaxial Actuation Measurement)，國立台灣大學機械工程學研究所碩士論文。

[1] Binnig G. and Rohrer H., “Scanning Tunneling Microscopy”, IBM Journal of Research and Development, Vol. 44, 2000, pp. 279-293.

[2] Michael J. B., Shahal I., Charles M. M., and Paul L. M., “Electrical Transport in Single-Wall Carbon Nanotubes “, Topics Application Physics, Vol. 111, 2008, pp. 455-493.

[3] Lalwani G., Kwaczala A. T., Kanakia S., Patel S. C., Judex S., and Sitharaman B., “Fabrication and characterization of three-dimensional macroscopic all-carbon scaffolds”, Carbon, Vol. 53, Mar. 2013, pp. 90-100.

[4] Michelson A. A., “The Relative Motion of the Earth and the Luminiferous Ether”, American Journal of Science, Vol. 34, 2003, pp. 333-345.