雙光子聚合技術之微產品品質改良

Quality Improvement for Micro Products Fabricated by Two-Photon Polymerization Technology

洪佳彬(Chia-Ping Hung)

指導教授 ： 鐘添東

國立臺灣大學/工學院/機械工程學研究所/碩士(2012年)

https://doi.org/10.6342/NTU.2012.00426

摘要

本論文研究雙光子聚合技術(Two photon polymerization, TPP)中微產品製造的品質管制與改良。本論文首先介紹高斯雷射的理論、傳統TPP加工程序、基本TPP產品性質的研究。其次介紹本實驗室架設的TPP實驗設備，包括雷射、顯微鏡、樹酯材料以及壓電定位平台。進而提及本實驗室開發的電腦輔助製造系統，該系統包含自動切層、加工路徑規劃以及雷射與壓電定位平台之控制。另外也提及一些對於此電腦輔助設計與製造系統的改進。再者針對TPP加工系統加以研究，以改進此製程並提高此系統加工的產品品質。所研究之內容包含：提高樹酯之穩定性、加工模擬、量測並驗證線的加工平滑度、量測並驗證面的加工粗糙度、交錯加工路徑的雷射曝光能量修正、加強中空微產品結構強度之補強肋的研究、最小加工線寬以及最小的加工線距。最後，利用此改良系統可製造具有高品質的產品。所提及的應用包含微型光柵、微型史努比模型以及微透鏡產品。

關鍵字

雙光子聚合 ； 雙光子吸收 ； 微奈米加工

並列摘要

This thesis studies quality control and improvement of micro products fabricated by Two-Photon Polymerization (TPP). First, related theorems about Gaussian laser beam, TPP fabrication process, and basic product properties are studied. Second, the experimental equipment with laser, microscope, resin material, and piezo stage are introduced. Also, the Computer-Aided Manufacturing (CAM) system with automatic slicing, path planning, laser controlling, and stage controlling functions are introduced. Some improvements about CAM and Computer-Aided Design (CAD) system are also introduced. Third, several methods about quality control and improvement of TPP fabrication, such as the enhancement of resin stability, fabrication simulation, verification of line smoothness and surface roughness, correction of the defects of the cross line intersection points, additional stiffened ribs study, minimum TPP line width, and minimum TPP line spacing are studied. Finally, based on these improvements, several applications of TPP products, such as micro grating, micro snoopy model, and micro lens are successfully fabricated.

並列關鍵字

Two-photon polymerization ； two-photon Absorption ； nano/micro manufacturing

參考文獻

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