以雙光子光致聚合微製造技術研製光動力微結構

Fabrication Study of Opto-Driven Micro-Structure By Two-Photon Absorption Photo-Polymerization

楊岳倫(Yue-Lun Yang)

指導教授 ： 林志郎

中臺科技大學/健康科學院/醫學工程暨材料研究所/碩士(2010年)

摘要

實驗室晶片，「Lab-on-a-Chip」(LOC)是近年來新興的尖端技術，可用來進行各式各樣的生醫檢測，具有簡便、快速及準確之優點，其關鍵技術包括能帶動流體流動之微元件、微感測器及微機械之動力來源。其中各式微結構亟需靈巧的製造技術方能達成LOC日益複雜的功能需求。
本研究利用雙光子吸收光致聚合(Two-photon absorption photo- polymerization, TPP)微製造技術，製造出LOC所需之微結構，包括阿基米德式微螺旋及槓桿式微感測器；而元件的動力來源，則利用雷射光鉗(Laser Tweezers)驅動螺旋旋轉及槓桿擺動，做為結構的動力來源。研究方法是以光鉗驅動TPP所製造的微螺旋，使其自動旋轉，並藉由調整光功率改變旋轉速度，得到功率與轉速之關係，探討不同型態之微螺旋的效能。實驗結果顯示，螺旋葉片數越多及螺紋數越少，則旋轉效能越佳。另外，本研究設計三種不同型態之微槓桿，同樣由光鉗驅動使其擺動，並結合彈簧設計，藉此開發槓桿式微感測器，此感測器可利用調整長短臂比值，達到作用力放大或位移放大的效果。
綜合言之，本論文結合TPP製造技術及雷射光鉗，開發出光動力微機械元件，研究成果將可在LOC這項新興的技術上提供解決方案。

關鍵字

雙光子光致聚合 ； 微螺旋 ； 微感測器 ； 實驗室晶片

並列摘要

Lab-on-a-chip (LOC) is an advanced technology that has emerged recently. It can be used to carry out a wide range application of bio- medical inspection with the characteristics of simple, fast and accurate. The key techniques of LOC consist of micro sensors, micro-mechanical power sources and the micro devices which can drive fluid flow. These micro devices need precision manufacturing skills to attain the demand of an increasingly complicated function.
In this study, we introduce the two-photon polymerization (TPP) micro-fabrication technique. This technique is utilized to fabricate the micro devices, such as the Archimedes-based micro-rotors and lever- based micro-sensors, with the specific power source-optical tweezers to drive the structures. The micro-rotors are driven automatically by optical tweezers. The rotation speed can be adjusted by changing the laser power of optical tweezers. Furthermore, we investigated the performance of different types of rotors. The experimental results indicate that the higher blade numbers with fewer screws will obtain higher rotation speed. In addition, we designed three types of micro-levers which swung by optical tweezers and combined with a spring to develop brand new lever type micro-sensors. These brand new micro-sensors with different ratios of long arm and short arm are able to raise the acting force or displacement.
In summary, we integrated the techniques of TPP and laser tweezers to develop the optical-driven micro-machinery devices. The results provide a solution for the applications of Lab-on-a-chip.

並列關鍵字

Two-photon polymerization ； Lab-on-a-chip ； micro-sensor ； micro-rotor

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