小型氣靜壓式導引高精度電磁致動器之設計與性能分析

Design and Development of Small Aerostatic Electromagnetic Linear Actuator with High Precision and Research on its Performance

吳佳霖(Cha-Lin Wu)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.00444

摘要

本論文整合電磁線圈及靜氣壓軸承設計開發一種小型氣靜壓式導引高精度之電磁致動器。雙列徑向供氣之氣靜壓軸承提供致動軸作徑向的支撐，其低摩擦之特性有助於提升定位精度，致動軸兩端外側設有固定線圈與致動線圈，調整致動線圈軸向位置可以改變致動器最大行動範圍。固定線圈及致動線圈對致動軸產生之磁力彼此相抗衡，透過控制致動線圈電流大小來改變磁力平衡關係，進而驅動致動軸達成定位之目的。氣靜壓軸承整合了端面節流孔和陶瓷軸承套，在致動軸圓周上建構出徑向支撐氣膜，氣靜壓軸承運用氣浮原理可以降低移動致動件的功率，減少摩擦之滯滑現象，並保持精密的導引。低功率之電磁線圈有助於減少熱膨脹造成之定位誤差，加上氣靜壓氣流之散熱效果可以使致動器能在長時間操作下保持精度。本研究透過有限元素分析及實驗探討電磁線圈組中之磁力變動情形，推得致動力及控制定位之關係，並討論其性能優劣。

關鍵字

電磁致動器 ； 電磁線圈 ； 氣靜壓軸承 ； 低摩擦驅動

並列摘要

The paper presents a novel design of a small aerostatic guided electromagnetic linear actuator, which is integrated with the electromagnetic solenoids and aerostatic bearings. The aerostatic bearing levitates the actuating rod with four radial air inlets on each side. The frictionless aerostatic guide can improve the actuating rod is electromagnetically driven by a fixed solenoid and a actuating solenoid. Through adjusting the axial position of the actuating solenoid, the actuating stroke can be fine regulated. The both solenoids create opposing magnetic forces, and their balancing condition can be controlled by the current regulation of the actuating solenoid. By means of the force balance controlling the electromagnetic actuator realizes the precision positioning. The aerostatic bearing integrates the surface restrictors with the ceramic journal bearings toe build up the radial supporting air film around the actuating rod for accurate guiding. The aerostatic levitation can effectively reduce the driving power for the actuating rod and avoid the stick-slip effect during the sliding process. The low driving power can also decrease the thermal induced positioning error, and the air flow can enhance the cooling efficiency for perserving long-time operational accuracy. By applying the finite element analyses and the experiments, the magnetic conditions insides the solenoids, the actuating force and the actuating displacement and studied.

並列關鍵字

electromagnetic linear actuator ； solenoid ； aerostatic ； low friction driving

參考文獻

[1] Binning, G. and Rohrer, H., "Surface studies by scanning tunneling microscopy", Physical Review Letters, Vol. 49, No. 1, July 5 1982, pp.57-61

[4] Lequesne, B.,"Fast-acting long-stroke bistable solenoids with moving permanent magnets", IEEE Transactions on Industry Applications, Vol.26, No. 3, 1990, pp.401-407.

[5] Nomura, K., Noritsugu, T., and Arai, J.,"Application of electromagnetic actuator using rubber film to three-degrees-of-freedom precision stage", Advanced Intelligent Mechatronics, Vol. 1, 2003, pp.101-106.

[10] 林家華,"電磁吸盤式二維壓電步進氣之設計開發與特性探討", 台灣大學碩士論文, 2005.

[2] 許金隆, "靜電式圓形簧片線性致動器開發與特性研究", 國台灣大學碩士論文, 1997.